Oxygen plasma cleaning machine is a non-destructive surface treatment equipment. In addition to the general surface cleaning function, it can also change the surface properties of specific materials, such as wettability, adhesion and so on. It is mainly used for surface cleaning, modification and etching of materials. The equipment uses numerical control technology to operate automatically, and the control of gas flux, vacuum degree and reaction time is very accurate. In addition, plasma cleaning will not cause secondary pollution to the substrate surface, and its composite product is also environmentally friendly to be carried out by gas.