NE-PE13F is a micro plasma cleaning machine developed for universities, scientific research institutes and enterprise laboratories, or innovative enterprises with small batch production. We have collected a large number of customer use information, analyzed application requirements, and applied years of design and manufacturing experience to miniaturized, multi-functional micro plasma cleaning machines. The equipment is mainly used for the following experiments : material cleaning and activation, ashing surface organic layer organic matter removal, bonding, changing hydrophilicity / hydrophobicity, metal reduction, surface etching, material aging experiment, degumming and other aspects.