NE-Q05 Quartz Chamber Plasma Cleaner
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DESCRIPTION

NE-Q05 is a small quartz vacuum plasma cleaner which is dedicated to cleaning and surface activation of a wide range of materials including polymers, metals, glass and ceramics, delivering optimum adhesion properties of otherwise difficult to bond materials.

NE-Q05 uses ICP plasma generation method, which has the characteristics of high plasma density and high dissociation rate. There is no electrode inside the vacuum chamber, which can avoid sputtering pollution. 

Quartz glass is selected as the vacuum chamber material. Quartz glass is easy to clean, high temperature resistant, has certain strength, and RF power can be completely transmitted. It is an ideal vacuum chamber material. 

2 independent inflatable pipeline. The multi-channel inflatable design can not only be flexibly filled with a single channel of different medium gases, but also can be filled with mixed gases, which is convenient for the later cleaning process. 

The control system includes automatic process control, data acquisition and recording, security chain protection and other functions. The process parameters ( cleaning power, time, etc. ) can be set or modified, and the parameters in the process can be displayed and recorded at the same time. The historical data can be called and consulted at any time.


PARAMETER


Overall dimensionsSize510mm(L)×480mm(W) ×540 mm(H)
Weight50KG(Including vacuum pump)
Plasma generatorPower0-200W(Adjustable)
Frequency13.56Mhz, Solid-state RF power supply
Vacuum chamberCavity materialQuartz
Discharge ModeICP
Cavity volume5L
Tray1 quartz tray
Cavity sizeΦ150(W)×280(D)mm
Gas Controlflow value0-500ml
Gas channel2 channels


PRODUCT FEATURES

01

Fast Deposition Rate

Fast Deposition Rate

02

Good Film Quality

Good Film Quality

03

Process Stability

Process Stability

04

High Productivity

High Productivity

05

Fully Automatic

Fully Automatic

06

Simple Operation

Simple Operation

RELATED PRODUCTS

Contact
  • +86 173 0440 3275
  • sales@naentech.cn
  • Huaming City, Guangming District, Shenzhen, Guangdong, China
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