The NE-PE25FH vacuum plasma cleaning machine is the most commonly used material surface modification equipment in laboratories. It mainly consists of a plasma generator, vacuum system, control system, sample chamber, etc. The principle is to generate a high-voltage alternating electric field through a radio frequency power supply in the atmosphere of process gases (O2, Ar, N2, H2, etc.) to excite the gas plasma. The energy carried by the plasma can break the bonding between surface adsorbed impurities and sample surface atoms, achieving the cleaning effect of the sample. The plasma free radicals and other impurities generated after bond breaking form volatile substances through other physical or chemical reactions, which are discharged with the airflow. In addition to cleaning organic pollutants and oxides on the surface of materials, plasma cleaning equipment can also improve the surface properties of materials, such as material adhesion, hydrophilic wettability, and compatibility.