Low-pressure Tabletop Plasma Cleaner NE-PE05
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DESCRIPTION

The NE-PE05 is a space-efficient laboratory-grade plasma system specifically designed for surface activation applications. It is widely adopted by research institutes, corporate R&D centers, and low-volume manufacturing facilities.

Utilizing advanced Capacitively Coupled Plasma (CCP) technology, the system integrates a complete vacuum processing setup comprising a stainless steel cylindrical chamber, RF plasma generator, vacuum pumping system, and precision gas flow controls. The robust chamber construction ensures long-term durability and stable process performance.

Engineered to enhance substrate adhesion strength and optimize surface wettability, the NE-PE05 supports diverse applications including material bonding, functional coating, thin-film deposition, and precision assembly processes.

Applications

  • Plasma cleaning organics

  • Plasma surface activation to improve adhesion

  • PDMS & microfluidic devices

  • PEEK & other engineering polymers

  • PTFE

  • Metals

  • Ceramics

  • Glass & optical devices

PARAMETER

ENCLOSUREDimensions590 × 565 × 470 mm(L × W × H)

PLASMA POWER SUPPLY 

Power0-300W, continuously variable output
Frequency40 kHz (optional: 13.56MHz)

CHAMBER

MaterialStainless Steel
Dimensions143 × 270 mm (Φ × D), 4.3L
Effective Processing Area134 × 248 mm (W × D)

PROCESS CONTROL

InterfacePLC with 4.3'' Touch Screen HMI
Gas Channelsx2 Float Flow Meter, compatible with O₂, Ar, N₂, H₂, etc.
Pressure GaugeVacuum Gauge

SERVICES

Electrical210-250 VAC, 50-60Hz
Power CordSuited to region
ComplianceCE


PRODUCT FEATURES

01

Fast Deposition Rate

Fast Deposition Rate

02

Good Film Quality

Good Film Quality

03

Process Stability

Process Stability

04

High Productivity

High Productivity

05

Fully Automatic

Fully Automatic

06

Simple Operation

Simple Operation

INDUSTRY APPLICATION

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