High-Precision RF Plasma Cleaner for Research Applications

Our Tabletop Plasma Cleaner is a compact, inexpensive tabletop plasma equipment with aredesigned hinged door and viewing window, active fan cooling and improved meteringvalve, suitable for nanoscale surface cleaning and activation of small samples.

NE-PE05F as a tabletop plasma cleaner which is a compact RF-powered plasma system that provides precise, low-damage treatment for sensitive surfaces such as semiconductors, MEMS, and thin films. This RF energy creates a conforming gas plasma that comes in contact with the material surfaces inside the vacuum chamber. Two or more steps can be conducted successively, such as surface cleaning and surface coating, or cleaning, etching, and activating due to advances in plasma system control software.

NE-PE05F's principle is to use high-frequency alternating electric fields to act on vacuum gas to form a large amount of plasma, and remove pollutants on the surface of materials through complex physical and chemical processes. This method can improve the adhesion and wettability of materials, remove different types of pollutants and impurities, and lay a good foundation for subsequent processes.

NE-PE05F is widely used in scientific research institutions, enterprise R&D units and small batch production proofing,including:

• Plasma cleaning organics

• Plasma surface activation to improve adhesion

• PDMS & microfluidic devices

• PEEK & other engineering polymers

• PTFE

• Metals

• Ceramics

• Glass & optical devices