Low-pressure Tabletop Plasma Cleaner NE-PE05F
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DESCRIPTION

NE-PE05F is a small radio frequency vacuum plasma cleaning machine, which uses high-frequency alternating electric fields to act on vacuum gas, forming a large amount of plasma, and removing pollutants on the surface of materials through complex physical and chemical processes. This method can improve the adhesion and wetting properties of materials, remove different types of pollutants and impurities, and lay a good foundation for subsequent processes.

PARAMETER

ENCLOSUREDimensions590 × 565 × 470 mm(L × W × H)
PLASMA POWER SUPPLY Power0-200W, continuously variable output
Frequency13.56MHz
CHAMBERMaterialStainless Steel
Dimensions143 × 270 mm (Φ × D), 4.3L
Effective Processing AreaSinger layer, 134 × 248 mm (W × D)
PROCESS CONTROLInterfacePLC with 4.3'' Touch Screen HMI
Gas Channelsx2 Float Flow Meter, compatible with O₂, Ar, N₂, H₂, etc.
Pressure GaugeVacuum Gauge
SERVICESElectrical210-250 VAC, 50-60Hz
Power CordSuited to region
ComplianceCE


PRODUCT FEATURES

01

Fast Deposition Rate

Fast Deposition Rate

02

Good Film Quality

Good Film Quality

03

Process Stability

Process Stability

04

High Productivity

High Productivity

05

Fully Automatic

Fully Automatic

06

Simple Operation

Simple Operation

RELATED PRODUCTS

Contact
  • +86 181 6571 2881
  • chenyan@naentech.cn
  • Huaming City, Guangming District, Shenzhen, Guangdong, China
Custom Plasma Equipment

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