DESCRIPTION
NE-PE13F is a micro plasma cleaning machine. It is microprocessor controlled benchtop plasma treatment systems which are ideally suited to surface activation, cleaning and modification of a wide range of materials including polymers, metals, glass and ceramics.
NE-PE13F has a range of gas inlet options to suit budget and application; fixed, single MFC, dual MFC and vapour delivery. With precision flow control and integrated pressure gauge, the NE-PE13F delivers unmatched reliability & repeatability by removing common errors in gas flow and gas type settings which will be familiar to users of equivalent equipment that utilise manual needle valves.
Address specific material treatments including:
Plasma cleaning
Plasma surface activation to improve adhesion
Functional plasma coatings
Plasma etching
PDMS & microfluidic devices
PEEK & other engineering polymers
PTFE
Metals
Ceramics
Glass & optical devices
PARAMETER
Enclosure | Dimensions | 600mm(L)×550mm(W) ×580 mm(H) |
Weight | 80KG (Including vacuum pump) | |
Plasma Generator | Power | 0–300W, continuously variable output |
Frequeny | 13.56 MHz | |
Chamber | Material | Stainless Steel |
Form | Cylindrical | |
Volume | 13.5L | |
Dimensions | 240(L)×280(D)x 200mm (H)mm | |
Process Control | Discharge Modes | CCP & RIE |
Interface | 4.3” with recipe store+PLC | |
Gas Channel Options | Float Flowmeter/x2 MFC (customizable) | |
Flow Value | 0-500ml | |
Services | Electrical | AC220, 50–60Hz |
Power Cord | Suited to region |
PRODUCT FEATURES
Fast Deposition Rate
Good Film Quality
Process Stability
High Productivity
Fully Automatic
Simple Operation
Plasma
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