NE-PE13F Micro Plasma Cleaning Machine
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DESCRIPTION

NE-PE13F is a micro plasma cleaning machine. It is microprocessor controlled benchtop plasma treatment systems which are ideally suited to surface activation, cleaning and modification of a wide range of materials including polymers, metals, glass and ceramics.


NE-PE13F has a range of gas inlet options to suit budget and application; fixed, single MFC, dual MFC and vapour delivery. With precision flow control and integrated pressure gauge, the NE-PE13F delivers unmatched reliability & repeatability by removing common errors in gas flow and gas type settings which will be familiar to users of equivalent equipment that utilise manual needle valves.


Address specific material treatments including:


  • Plasma cleaning

  • Plasma surface activation to improve adhesion

  • Functional plasma coatings

  • Plasma etching

  • PDMS & microfluidic devices

  • PEEK & other engineering polymers

  • PTFE

  • Metals

  • Ceramics

  • Glass & optical devices

PARAMETER

EnclosureDimensions600mm(L)×550mm(W) ×580 mm(H)
Weight80KG (Including vacuum pump)
Plasma GeneratorPower0–300W, continuously variable output
Frequeny13.56 MHz
ChamberMaterialStainless Steel
FormCylindrical
Volume13.5L
Dimensions240(L)×280(D)x 200mm (H)mm
Process Control

Discharge Modes

CCP & RIE

Interface4.3” with recipe store+PLC
Gas Channel OptionsFloat Flowmeter/x2 MFC (customizable)
Flow Value0-500ml
ServicesElectricalAC220, 50–60Hz
Power CordSuited to region

PRODUCT FEATURES

01

Fast Deposition Rate

Fast Deposition Rate

02

Good Film Quality

Good Film Quality

03

Process Stability

Process Stability

04

High Productivity

High Productivity

05

Fully Automatic

Fully Automatic

06

Simple Operation

Simple Operation

RELATED PRODUCTS

Contact
  • +86 173 0440 3275
  • sales@naentech.cn
  • Huaming City, Guangming District, Shenzhen, Guangdong, China
Custom Plasma Equipment

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