Quartz Chamber ICP Plasma CleanerNE-Q05
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DESCRIPTION

ICP Plasma CleanerNE-Q05 adopts the ICP inductively coupled external electrode plasma generation method, which is characterized by a simple structure, high plasma density, and no electrodes inside the chamber, effectively avoiding electrode sputtering pollution. The vacuum chamber adopts a high-purity quartz glass chamber, which is easy to clean and not easy to react with the product.

Plasma cleaning machines can enhance the adhesion, compatibility, and wettability of samples, as well as disinfect and sterilize them. At present, plasma cleaning technology is widely used in fields such as optics, optoelectronics, electronics, materials science, life sciences, polymers, biomedicine, microfluidics, etc.

PARAMETER

ModelNE-Q05
Plasma Frequency13.56 MHz, solid state RF power supply
Power
0-200 W (adjustable)
Chamber MaterialQuartz
Chamber Size(Φ) 150 × (D) 270 MM
Chamber Volume4.7 L
Control Mode 4.3'' touch screen + PLC
Gas Channels2 channels, support O2、Ar、N2、H2, etc
Dimensions510 (L)×480 (W) ×540(H) MM


PRODUCT FEATURES

01

Fast Deposition Rate

Fast Deposition Rate

02

Good Film Quality

Good Film Quality

03

Process Stability

Process Stability

04

High Productivity

High Productivity

05

Fully Automatic

Fully Automatic

06

Simple Operation

Simple Operation

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