DESCRIPTION
ICP Plasma CleanerNE-Q05 adopts the ICP inductively coupled external electrode plasma generation method, which is characterized by a simple structure, high plasma density, and no electrodes inside the chamber, effectively avoiding electrode sputtering pollution. The vacuum chamber adopts a high-purity quartz glass chamber, which is easy to clean and not easy to react with the product.
Plasma cleaning machines can enhance the adhesion, compatibility, and wettability of samples, as well as disinfect and sterilize them. At present, plasma cleaning technology is widely used in fields such as optics, optoelectronics, electronics, materials science, life sciences, polymers, biomedicine, microfluidics, etc.
PARAMETER
Model | NE-Q05 |
Plasma Frequency | 13.56 MHz, solid state RF power supply |
Power | 0-200 W (adjustable) |
Chamber Material | Quartz |
Chamber Size | (Φ) 150 × (D) 270 MM |
Chamber Volume | 4.7 L |
Control Mode | 4.3'' touch screen + PLC |
Gas Channels | 2 channels, support O2、Ar、N2、H2, etc |
Dimensions | 510 (L)×480 (W) ×540(H) MM |
PRODUCT FEATURES
Fast Deposition Rate
Good Film Quality
Process Stability
High Productivity
Fully Automatic
Simple Operation
Plasma
Copyright@ NAEN Technology Co., Ltd. All Rights Reserved.|
Sitemap
| Powered by