DESCRIPTION
Plasma Surface Treatment Machine is mainly suitable for cleaning LED packaging substrates. Plasma Surface Treatment Machine can effectively remove organic matter, oxides and particulate pollutants on its surface.
Adding plasma cleaning before solid crystal, bonding and plastic sealing in the LED packaging process can effectively improve the pasting performance and bonding quality. The role of plasma cleaning in the entire LED packaging process mainly includes preventing encapsulation delamination, improving welding wire quality, increasing bonding strength, improving reliability, and increasing yield rate to save costs.
Compared with ordinary horizontal plasma cleaning machines, this LED material box Plasma Surface Treatment Machine adopts a vertical electrode design. When the reaction chamber is evacuated, the plasma generated by radio frequency excitation will move in a directional manner due to the layout of the positive and negative electrodes.
The excited plasma can move horizontally under the guidance of the positive and negative electrodes, and then move obliquely downward under the combined action of the backward vacuum force and gravity, thereby ensuring that the plasma optimally impacts the surface of the cleaning material, thereby achieving the best cleaning effect and good uniformity.
PARAMETER
Model | NE-IC08 |
Chamber Material | Aviation aluminum alloy |
Vacuum Pump | Rotary vane pump + Roots pump |
Process Gas | MFC |
Chamber Dimensions | W600×H450×D500(mm) |
Plasma Generator | 13.56MHz |
Power Supply | 500W (Adjustable) |
Electrical | AC380V |
Dimensions | 830mm(W)×1200mm(H) ×1758 mm(D) |
PRODUCT FEATURES
Fast Deposition Rate
Good Film Quality
Process Stability
High Productivity
Fully Automatic
Simple Operation
Plasma
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