DESCRIPTION
Advanced Plasma Treatment Machine features large format vacuum chambers along with many advanced features, all with the reliability of recipe driven PLC control. They are configurable tools that are both robust enough for reliable, repeatable industrial processing and at the same time flexible enough for the research into, and development of, leading-edge plasma processes.
Advanced Plasma Treatment Machine used for cleaning, adhesion improvement and enhanced wetting of surfaces via plasma surface activation. Treatments can be performed equally on metals, polymers, composites, glass and ceramics.
NE-PE110 is a large-scale Advanced Plasma Treatment System, equipped with high power, large cavity, high density, high stability, for large-scale continuous production. It is used in a wide range of fields, from the manufacture of semiconductors and electronic components to medical applications. Plasma treatment cleans materials by decomposing and vaporizing microscopic organic matter adhering to the material surface. It also has the effect of surface modification by breaking molecular bonds on the material surface and changing the surface composition. In addition, the plasma decorates the surface of the material with hydroxyl groups, making it hydrophilic and less likely to repel liquids.
Benefits
Compact standalone unit
User friendly recipe driven interface
Unlimited recipes and steps per recipe
Fast treatment time
Precise & repeatable
No hazardous emissions
PARAMETER
Enclosure | Dimensions | 936mm(L)×996mm(W) ×1755 mm(H) |
Weight | 400KG(Including vacuum pump) | |
Plasma Generator | Frequency | 40KHz |
Power | 2000W(Adjustable) | |
Chamber | Material | Aviation-grade aluminum allo |
Volume | 110L | |
Dimensions | 500(L)×500(D)×470(H)mm | |
Process Layers | 8 | |
Process Control | Discharge Modes | CCP |
Gas Flow Controller | Gas Supply | 2 gas channel via MFC |
Flow Value | 0-500 SCCM | |
Vacuum Gauge | Pirani | |
Control Mode | 10” with recipe store+PLC | |
Services | Electrical | AC380V, 50-60Hz |
Power Cord | Suited to region |
PRODUCT FEATURES
Fast Deposition Rate
Good Film Quality
Process Stability
High Productivity
Fully Automatic
Simple Operation
Plasma
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