NE-PE110 Advanced Plasma Treatment Machine
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DESCRIPTION

Advanced Plasma Treatment Machine features large format vacuum chambers along with many advanced features, all with the reliability of recipe driven PLC control. They are configurable tools that are both robust enough for reliable, repeatable industrial processing and at the same time flexible enough for the research into, and development of, leading-edge plasma processes. 


Advanced Plasma Treatment Machine used for cleaning, adhesion improvement and enhanced wetting of surfaces via plasma surface activation. Treatments can be performed equally on metals, polymers, composites, glass and ceramics.


NE-PE110 is a large-scale Advanced Plasma Treatment System, equipped with high power, large cavity, high density, high stability, for large-scale continuous production. It is used in a wide range of fields, from the manufacture of semiconductors and electronic components to medical applications. Plasma treatment cleans materials by decomposing and vaporizing microscopic organic matter adhering to the material surface. It also has the effect of surface modification by breaking molecular bonds on the material surface and changing the surface composition. In addition, the plasma decorates the surface of the material with hydroxyl groups, making it hydrophilic and less likely to repel liquids.


Benefits


  • Compact standalone unit

  • User friendly recipe driven interface

  • Unlimited recipes and steps per recipe

  • Fast treatment time

  • Precise & repeatable

  • No hazardous emissions


PARAMETER

EnclosureDimensions936mm(L)×996mm(W) ×1755 mm(H)
Weight

400KG(Including vacuum pump)

Plasma GeneratorFrequency

40KHz

Power

2000W(Adjustable)

Chamber
Material

Aviation-grade aluminum allo

Volume110L

Dimensions

500(L)×500(D)×470(H)mm

Process Layers8
Process Control

Discharge Modes

CCP
Gas Flow ControllerGas Supply

2 gas channel via MFC

Flow Value

0-500 SCCM
Vacuum Gauge

Pirani 

Control Mode10” with recipe store+PLC
ServicesElectricalAC380V, 50-60Hz
Power CordSuited to region


PRODUCT FEATURES

01

Fast Deposition Rate

Fast Deposition Rate

02

Good Film Quality

Good Film Quality

03

Process Stability

Process Stability

04

High Productivity

High Productivity

05

Fully Automatic

Fully Automatic

06

Simple Operation

Simple Operation

RELATED PRODUCTS

Contact
  • +86 173 0440 3275
  • sales@naentech.cn
  • Huaming City, Guangming District, Shenzhen, Guangdong, China
Custom Plasma Equipment

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