NE-PE180 LF-Special Plasma Cleaner
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DESCRIPTION

LF-Special Plasma Cleaner is a short cycle plasma system can easily be integrated into an existing production line. This automatic system will also reduce operator error. LF-Special Plasma Systems is a process equipment used for material surface pretreatment. 


NE-PE180 can realize a series of processes such as surface cleaning, activation and modification, etching, etc. Through high-voltage electric field and radio frequency power supply to stimulate argon, oxygen and other gases into plasma groups. Plasma groups include positive ions, negative ions, free radicals and various active groups, etc., which act on the surface of the product to remove the original trace pollutants and impurities on the surface; at the same time, this process will also produce etching, which can make the sample surface rough, form many fine pits, increase the specific surface area of the material surface, and improve the adhesion and wetting properties of the solid surface; it provides more possibilities for the subsequent dispensing, inkjet printing, bonding and other processes of the material.


NE-PE180 is highly automated and intelligent. It is equipped with advanced control systems and monitoring equipment that can monitor and adjust the treatment process to ensure that each workpiece receives a consistent treatment effect. At the same time, the equipment is easy to operate, can run continuously, and is easy to maintain and repair.


Applications:


  • Plasma cleaning organics

  • Plasma surface activation to improve adhesion

  • Form new functional groups and improve hydrophilicity

  • Wafer Cleaning, remove the photoresist

  • ITO & FTO & Glass & Pottery &Metal 

  • PP & PET & PVC & PEEK & PC

PARAMETER

EnclosureDimensions1420mm(L)*1190mm(w)*1700mm(H)
Weight

600KG(Including vacuum pump)

Plasma Generator Frequency40KHz
Power

5000W(Adjustable)

Chamber

Material

Aviation-grade aluminum allo

Volume180L
Dimensions

600(L)×600(D)×500(H)mm

Layers

6

Discharge Mode

CCP 

Process Control

Control Mode

10” with recipe store+PLC

Flow Value

0-500 SCCM

Vacuum Gauge

Pirani 

Gas Supply2 gas channel via MFC
ServicesElectrical

AC380V, 50/60Hz 

Power CordSuited to region


PRODUCT FEATURES

01

Fast Deposition Rate

Fast Deposition Rate

02

Good Film Quality

Good Film Quality

03

Process Stability

Process Stability

04

High Productivity

High Productivity

05

Fully Automatic

Fully Automatic

06

Simple Operation

Simple Operation

RELATED PRODUCTS

Contact
  • +86 173 0440 3275
  • sales@naentech.cn
  • Huaming City, Guangming District, Shenzhen, Guangdong, China
Custom Plasma Equipment

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