DESCRIPTION
LF-Special Plasma Cleaner is a short cycle plasma system can easily be integrated into an existing production line. This automatic system will also reduce operator error. LF-Special Plasma Systems is a process equipment used for material surface pretreatment.
NE-PE180 can realize a series of processes such as surface cleaning, activation and modification, etching, etc. Through high-voltage electric field and radio frequency power supply to stimulate argon, oxygen and other gases into plasma groups. Plasma groups include positive ions, negative ions, free radicals and various active groups, etc., which act on the surface of the product to remove the original trace pollutants and impurities on the surface; at the same time, this process will also produce etching, which can make the sample surface rough, form many fine pits, increase the specific surface area of the material surface, and improve the adhesion and wetting properties of the solid surface; it provides more possibilities for the subsequent dispensing, inkjet printing, bonding and other processes of the material.
NE-PE180 is highly automated and intelligent. It is equipped with advanced control systems and monitoring equipment that can monitor and adjust the treatment process to ensure that each workpiece receives a consistent treatment effect. At the same time, the equipment is easy to operate, can run continuously, and is easy to maintain and repair.
Applications:
Plasma cleaning organics
Plasma surface activation to improve adhesion
Form new functional groups and improve hydrophilicity
Wafer Cleaning, remove the photoresist
ITO & FTO & Glass & Pottery &Metal
PP & PET & PVC & PEEK & PC
PARAMETER
Enclosure | Dimensions | 1420mm(L)*1190mm(w)*1700mm(H) |
Weight | 600KG(Including vacuum pump) | |
Plasma Generator | Frequency | 40KHz |
Power | 5000W(Adjustable) | |
Chamber | Material | Aviation-grade aluminum allo |
Volume | 180L | |
Dimensions | 600(L)×600(D)×500(H)mm | |
Layers | 6 | |
Discharge Mode | CCP | |
Process Control | Control Mode | 10” with recipe store+PLC |
Flow Value | 0-500 SCCM | |
Vacuum Gauge | Pirani | |
Gas Supply | 2 gas channel via MFC | |
Services | Electrical | AC380V, 50/60Hz |
Power Cord | Suited to region |
PRODUCT FEATURES
Fast Deposition Rate
Good Film Quality
Process Stability
High Productivity
Fully Automatic
Simple Operation
Plasma
Copyright@ NAEN Technology Co., Ltd. All Rights Reserved.|
Sitemap
| Powered by