Microwave plasma cleaning machine is a kind of advanced equipment that uses microwave energy to produce plasma to clean the surface of objects. It can remove organic matter, photoresist, inorganic matter, oxide layer and other pollutants. It can clean the surface of silicon wafer, gold PAD, aluminum PAD and so on. The cleaning machine has the advantages of convenient operation, high efficiency, clean surface, no scratch, and is conducive to ensuring product quality. There is no air pollution in the cleaning process, and no waste liquid and waste residue are produced. It is a real energy saving and cost reduction.