NE-PE60F 60ltr Low Pressure Plasma Cleaner
Home / Products / Low Pressure Plasma System / Production Plasma Cleaner / 60ltr Low Pressure Plasma Cleaner

DESCRIPTION

NE-PE60F is a large-scale industrial vacuum plasma treatment system, Equipped with large high performance vacuum chamber and plasma electrode system, it is suitable for large-scale continuous production. NE-PE60F uses high performance vacuum pump to rapidly produce ultra-low vacuum pressure. At the same time, according to the process requirements of customers, different mixed process gas is passed into the vacuum reaction chamber, and high quality high-frequency plasma generator is adopted to make the process gas to generate plasma, and ensure the stable production of high density and high energy ions. The plasma interacts with the material through complex physical and chemical reactions to achieve different process functions, such as cleaning, activation, etching and coating. The plasma state is notable for its highly homogeneous glow discharge, which emits visible light in colors ranging from blue to deep purple depending on the gas.

PARAMETER

ModelNE-PE60F
Chamber material316 stainless steel, military grade seal
RF Power0-100W
Plasma generator frequency13.56MHz
Chamber Dimensions400(W)*450(D)*370(H)mm
Vacuum level0.6~0.8MPa
Gas channel3
Machine Dimensions900mm(L)×960mm(W) ×1750 mm(H)
Power supplyAC380V/50Hz

PRODUCT FEATURES

01

Fast Deposition Rate

Fast Deposition Rate

02

Good Film Quality

Good Film Quality

03

Process Stability

Process Stability

04

High Productivity

High Productivity

05

Fully Automatic

Fully Automatic

06

Simple Operation

Simple Operation

RELATED PRODUCTS

Contact
  • +86 173 0440 3275
  • sales@naentech.cn
  • Huaming City, Guangming District, Shenzhen, Guangdong, China
Custom Plasma Equipment

Copyright@ NAEN Technology Co., Ltd. All Rights Reserved.| Sitemap | Powered by Reanod  

whatsapp
whatsapp