NE-PE60F is a large-scale industrial vacuum plasma treatment system, Equipped with large high performance vacuum chamber and plasma electrode system, it is suitable for large-scale continuous production. NE-PE60F uses high performance vacuum pump to rapidly produce ultra-low vacuum pressure. At the same time, according to the process requirements of customers, different mixed process gas is passed into the vacuum reaction chamber, and high quality high-frequency plasma generator is adopted to make the process gas to generate plasma, and ensure the stable production of high density and high energy ions. The plasma interacts with the material through complex physical and chemical reactions to achieve different process functions, such as cleaning, activation, etching and coating. The plasma state is notable for its highly homogeneous glow discharge, which emits visible light in colors ranging from blue to deep purple depending on the gas.
|316 stainless steel, military grade seal
|Plasma generator frequency
|900mm(L)×960mm(W) ×1750 mm(H)
Fast Deposition Rate
Good Film Quality
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