PARAMETER
| Model | NE-PE60F |
| Cavity material | Stainless steel or aluminum alloy optional |
| Power | 0-600W |
| Plasma generator frequency | 13.56MHz |
| Control method | 10 -inch touch screen (automatic+manual mode) |
| Extreme vacuum | 2Pa |
| Gas channel | 3 |
| Equipment power | S 3KW |
| Vacuum work | 10 ~ 150Pa |
| Reaction warehouse size (w*h*d) | 450*360*470 |
| Dimensions (W*H*D) | 1100*1850*1200 |
| Power supply | AC380V/50Hz |
PRODUCT FEATURES
Fast Deposition Rate
Good Film Quality
Process Stability
High Productivity
Fully Automatic
Simple Operation
Plasma
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