LED Packaging Vacuum Plasma Cleaner NE-IC08
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DESCRIPTION

Vacuum Plasma Cleaner NE-IC08 is specifically engineered for cleaning LED packaging substrates. It effectively removes organic residues, oxides, and particulate contaminants from substrate surfaces, ensuring optimal conditions for subsequent processing.

Integrating plasma cleaning prior to die attachment, wire bonding, and encapsulation in the LED packaging process significantly enhances adhesion performance and bonding integrity. This critical step prevents encapsulation delamination, improves wire bonding quality, increases interfacial adhesion strength, enhances device reliability, and ultimately boosts production yield while reducing manufacturing costs.

Advanced Vertical Electrode Design

Unlike conventional horizontal plasma systems, the NE-IC08 features an innovative vertical electrode configuration. During chamber evacuation, the RF-excited plasma undergoes directional movement guided by the strategic placement of positive and negative electrodes. The activated plasma initially travels horizontally along the electrode path, then follows a controlled downward trajectory combining vacuum suction and gravitational forces. This unique motion pattern ensures optimal plasma impingement on substrate surfaces, delivering superior cleaning effectiveness and exceptional treatment uniformity.

Advantages

  1. Rapid Processing Capability
    Accelerates production cycles by significantly reducing processing time, enabling manufacturers to meet demanding delivery schedules.

  2. Exceptional Treatment Quality
    Delivers consistent surface activation that eliminates yield loss due to inadequate adhesion, reducing material waste and rework.

  3. Continuous Operation Reliability
    Engineered for 24/7 industrial operation with outstanding process stability, minimizing unplanned downtime and increasing equipment utilization.

  4. Seamless Production Integration
    Designed for straightforward implementation into automated manufacturing lines, supporting high-volume production requirements.

Applications

  1. Electronics: PCB surface activation, LED packaging adhesion enhancement

  2. Automotive: Weatherstrip coating pretreatment, sensor housing cleaning

  3. Medical: Syringe barrel sterilization, medical adhesive tape bonding

  4. Packaging: Plastic film printing preparation, food packaging anti-fog treatment

PARAMETER

ENCLOSUREDimensions830 × 1200 × 1758 mm(L × W × H)

PLASMA POWER SUPPLY

Power0-1000W, continuously variable output 
Frequency13.56MHz

CHAMBER

MaterialAluminum Alloy
Dimensions600 × 450 × 500 mm (W × D × H), two-tier internal structure with 4 slots per tier
Effective Processing Area135 × 160  × 370 mm (W × D × H), 8 slots
Gas Channelx2 MFC, compatible with O₂, Ar, N₂, H₂, etc.

SERVICES

Electrical
AC380V
Power CordSuited to region
ComplianceCE


PRODUCT FEATURES

01

Fast Deposition Rate

Fast Deposition Rate

02

Good Film Quality

Good Film Quality

03

Process Stability

Process Stability

04

High Productivity

High Productivity

05

Fully Automatic

Fully Automatic

06

Simple Operation

Simple Operation

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