NE-PE210F Vacuum Plasma Cleaning Equipment
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DESCRIPTION

NE-PE210F is a vacuum plasma cleaning equipment suitable for large-scale industrial production. Plasma cleaning achieves the purpose of cleaning by chemically reacting the active ions in it with the surface of the object. For example, oxygen is used to clean the organic matter on the surface of the object, producing an oxidation reaction, and the oxygen plasma and pollutants produce carbon dioxide, carbon oxide and water. The plasma formed by nitrogen ionization can react critically with some substructures, so it is also an active gas, but compared with oxygen and hydrogen, the particles are relatively heavy; while cleaning and activating, it can achieve a certain bombardment and etching effect to prevent oxidation of some metal surfaces. Nowadays, plasma cleaning machines are widely used in contemporary semiconductors, circuits and other industries. Before component packaging and chip bonding, plasma cleaning can be used. Its advantages are high cleaning efficiency and no damage to the sample surface, thereby improving product quality.

PARAMETER

ModelNE-PE210F
Plasma generator frequencyRF 13.56 MHz (automatic impedance matching)
Ultimate vacuum10Pa
Power
0-1000W (adjustable)
Chamber material316 stainless steel / aluminum alloy (optional)
Chamber size600 (W) x 610 (D) x 600 (H) MM
Chamber volume219 L
Processing area(W) 559 x (D) 520 MM
Gas channels2 channels, supporting O₂, Ar, N₂ and H₂, etc
Processing layers7 layers (customizable)
Control mode
PLC + Touch Screen
Power supplyAC 380V, 50 / 60Hz
Dimensions1350 (L)×1200 (W) ×1850 (H) MM


PRODUCT FEATURES

01

Fast Deposition Rate

Fast Deposition Rate

02

Good Film Quality

Good Film Quality

03

Process Stability

Process Stability

04

High Productivity

High Productivity

05

Fully Automatic

Fully Automatic

06

Simple Operation

Simple Operation

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