NE-PE60F Low-pressure Plasma Cleaning Machine provides stable process control through PLC. The real-time parameters of equipment operation are intuitively presented through the touch screen. The software control system is simple to operate. It can connect to the control equipment and set various cleaning process curves, and set, modify, store and call according to different processes; the software has its own analysis function and can analyze the process curve. The software control system automatically records the cleaning process parameters and temperature curve, time, and alarm related data in real time to ensure the traceability of the product cleaning process. The 13.56MHz RF power supply and automatic matching system have excellent stability and repeatability, diversified optional gas configuration, flexible electrode structure settings and optimized gas feed and distribution schemes to meet the cleaning process requirements of different types of products.

Compared with wet cleaning process, plasma cleaning does not require the use of strong acid, strong alkali and other solutions, does not require a subsequent drying process, and does not require wastewater treatment. It is a simple, efficient, economical, environmentally friendly, and non-secondary pollution cleaning method. Plasma cleaning can improve the cleanliness, hydrophilicity and wettability of the material surface, increase the polarity of the substrate surface, and remove contamination and organic matter on the substrate surface.