DESCRIPTION
Vacuum Plasma Cleaner NE-PE160 uses plasma to clean the surface of materials to achieve the purpose of cleaning, activation, modification, etching, etc. It can be used for precision cleaning in industries such as semiconductors, microelectronics, pre-COG, LED processes, pre-device packaging, vacuum electronics, connectors and relays, activation of surfaces such as plastics, rubber, metals and ceramics, and life science experiments.
NE-PE160 is mainly composed of three parts: control unit, vacuum chamber and vacuum pump. Through CNC technology, various parameters can be easily adjusted. Because the cleaning process is carried out in the vacuum chamber, there is no need to dry after cleaning. It is simple to operate and environmentally friendly.
PARAMETER
| ENCLOSURE | Dimensions | 1170 × 1190 × 1825 mm(L × W × H) |
PLASMA POWER SUPPLY | Power | 0-1000W (optional: 0-5000W) |
| Frequency | 13.56MHz (optional: 40 kHz) | |
CHAMBER | Material | Stainless Steel (optional: Aluminum Alloy) |
| Dimensions | 550 × 600 × 500 mm (L × D × H), 165L | |
| Effective Processing Area | 508 × 510 mm (W × D) | |
| Shelves | 8 | |
PROCESS CONTROL | Interface | PLC with 7'' Touch Screen HMI |
| Gas Channels | x2 MFC, compatible with O₂, Ar, N₂, H₂, etc. | |
| Pressure Gauge | Pirani Sensor | |
SERVICES | Electrical | 380 VAC, 50-60Hz |
| Power Cord | Suited to region | |
| Compliance | CE |
PRODUCT FEATURES
Fast Deposition Rate
Good Film Quality
Process Stability
High Productivity
Fully Automatic
Simple Operation
Plasma
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