Low-pressure Vacuum Plasma Cleaner NE-PE160
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DESCRIPTION

Vacuum Plasma Cleaner NE-PE160 uses plasma to clean the surface of materials to achieve the purpose of cleaning, activation, modification, etching, etc. It can be used for precision cleaning in industries such as semiconductors, microelectronics, pre-COG, LED processes, pre-device packaging, vacuum electronics, connectors and relays, activation of surfaces such as plastics, rubber, metals and ceramics, and life science experiments.

NE-PE160 is mainly composed of three parts: control unit, vacuum chamber and vacuum pump. Through CNC technology, various parameters can be easily adjusted. Because the cleaning process is carried out in the vacuum chamber, there is no need to dry after cleaning. It is simple to operate and environmentally friendly.

PARAMETER

ENCLOSUREDimensions1170 × 1190 × 1825 mm(L × W × H)

PLASMA POWER SUPPLY

Power0-1000W (optional: 0-5000W)
Frequency13.56MHz (optional: 40 kHz)

CHAMBER

MaterialStainless Steel (optional: Aluminum Alloy)
Dimensions550 × 600 × 500 mm (L × D × H), 165L
Effective Processing Area508 × 510 mm (W × D)
Shelves8

PROCESS CONTROL

InterfacePLC with 7'' Touch Screen HMI
Gas Channelsx2 MFC, compatible with O₂, Ar, N₂, H₂, etc.
Pressure GaugePirani Sensor

SERVICES

Electrical380 VAC, 50-60Hz
Power CordSuited to region
ComplianceCE


PRODUCT FEATURES

01

Fast Deposition Rate

Fast Deposition Rate

02

Good Film Quality

Good Film Quality

03

Process Stability

Process Stability

04

High Productivity

High Productivity

05

Fully Automatic

Fully Automatic

06

Simple Operation

Simple Operation

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