DESCRIPTION
NE-PE210 is a vacuum plasma cleaner suitable for large-scale industrial production. Plasma cleaning achieves the purpose of cleaning by chemically reacting the active ions in it with the surface of the object. For example, oxygen is used to clean the organic matter on the surface of the object, producing an oxidation reaction, and the oxygen plasma and pollutants produce carbon dioxide, carbon oxide and water. The plasma formed by nitrogen ionization can react critically with some substructures, so it is also an active gas, but compared with oxygen and hydrogen, the particles are relatively heavy; while cleaning and activating, it can achieve a certain bombardment and etching effect to prevent oxidation of some metal surfaces. Nowadays, plasma cleaning machines are widely used in contemporary semiconductors, circuits and other industries. Before component packaging and chip bonding, plasma cleaning can be used. Its advantages are high cleaning efficiency and no damage to the sample surface, thereby improving product quality.
PARAMETER
| ENCLOSURE | Dimensions | 1350 × 1200 × 1850 mm(L × W × H) |
PLASMA POWER SUPPLY | Power | 0-2000W (optional: 0-5000W) |
| Frequency | 13.56MHz (optional: 40 kHz) | |
CHAMBER | Material | Stainless Steel (optional: Aluminum Alloy) |
| Dimensions | 600 × 610 × 600 mm (L × D × H), 219L | |
| Effective Processing Area | 559 × 520 mm (W × D) | |
| Shelves | 7 | |
PROCESS CONTROL | Interface | PLC with 10'' Touch Screen HMI |
| Gas Channels | x2 MFC, compatible with O₂, Ar, N₂, H₂, etc. | |
| Pressure Gauge | Pirani Sensor | |
SERVICES | Electrical | 380 VAC, 50-60Hz |
| Power Cord | Suited to region | |
| Compliance | CE |
PRODUCT FEATURES
Fast Deposition Rate
Good Film Quality
Process Stability
High Productivity
Fully Automatic
Simple Operation
Plasma
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