Low-pressure Vacuum Plasma Cleaner NE-PE80
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DESCRIPTION

NE-PE80 Vacuum Plasma Cleaner is mainly composed of vacuum chamber, high-frequency plasma power supply, vacuum generation and measurement system, process gas system, control system and other parts. 

The basic working principle is to use a vacuum pump to evacuate the working room to a certain vacuum degree, and then introduce process gas. Under the action of the high-frequency generator, a high-frequency alternating electric field is formed between the anode and the cathode to ionize the gas and form plasma. When the gas reaches the plasma state, the gaseous molecules will split into many highly active particles. 

The mechanism of  Vacuum Plasma Cleaner relies on the "activation" of substances in the "plasma state" to achieve the purpose of removing stains on the surface of objects or improving surface activity. It can be used to improve the adhesion, hydrophilicity, printing and other properties of products, and can also be used to remove organic matter, oil stains, oxide layers and other pollutants on the surface of materials.

NE-PE80 is a large-scale industrial low pressure plasma treatment system, equipped with high power, large cavity, high density, high stability, for large-scale continuous production. 

Appications

  1. Plasma cleaning organics

  2. Plasma surface activation to improve adhesion

  3. Form new functional groups and improve hydrophilicity

  4. Wafer Cleaning, remove the photoresist

  5. ITO & FTO & Glass & Pottery &Metal 

  6. PP & PET & PVC & PEEK & PC

PARAMETER

ENCLOSUREDimensions1100 × 1145 × 1760 mm(L × W × H)

PLASMA POWER SUPPLY 

Power0-1000W, continuously variable output
Frequency13.56MHz (optional: 40 kHz)

CHAMBER

MaterialStainless Steel (optional: Aluminum Alloy)
Dimensions450 × 490 × 380 mm (L × D × H), 83L
Effective Processing Area400 × 360 mm (W × D)
Shelves6

PROCESS CONTROL

InterfacePLC with 10'' Touch Screen HMI
Gas Channelsx2 MFC, compatible with O₂, Ar, N₂, H₂, etc.
Pressure GaugePirani Sensor

SERVICES

Electrical380 VAC, 50-60Hz
Power CordSuited to region
ComplianceCE


PRODUCT FEATURES

01

Fast Deposition Rate

Fast Deposition Rate

02

Good Film Quality

Good Film Quality

03

Process Stability

Process Stability

04

High Productivity

High Productivity

05

Fully Automatic

Fully Automatic

06

Simple Operation

Simple Operation

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