DESCRIPTION
NE-PE80 Vacuum Plasma Cleaner is mainly composed of vacuum chamber, high-frequency plasma power supply, vacuum generation and measurement system, process gas system, control system and other parts.
The basic working principle is to use a vacuum pump to evacuate the working room to a certain vacuum degree, and then introduce process gas. Under the action of the high-frequency generator, a high-frequency alternating electric field is formed between the anode and the cathode to ionize the gas and form plasma. When the gas reaches the plasma state, the gaseous molecules will split into many highly active particles.
The mechanism of Vacuum Plasma Cleaner relies on the "activation" of substances in the "plasma state" to achieve the purpose of removing stains on the surface of objects or improving surface activity. It can be used to improve the adhesion, hydrophilicity, printing and other properties of products, and can also be used to remove organic matter, oil stains, oxide layers and other pollutants on the surface of materials.
NE-PE80 is a large-scale industrial low pressure plasma treatment system, equipped with high power, large cavity, high density, high stability, for large-scale continuous production.
Plasma cleaning organics
Plasma surface activation to improve adhesion
Form new functional groups and improve hydrophilicity
Wafer Cleaning, remove the photoresist
ITO & FTO & Glass & Pottery &Metal
PP & PET & PVC & PEEK & PC
PARAMETER
| ENCLOSURE | Dimensions | 1100 × 1145 × 1760 mm(L × W × H) |
PLASMA POWER SUPPLY | Power | 0-1000W, continuously variable output |
| Frequency | 13.56MHz (optional: 40 kHz) | |
CHAMBER | Material | Stainless Steel (optional: Aluminum Alloy) |
| Dimensions | 450 × 490 × 380 mm (L × D × H), 83L | |
| Effective Processing Area | 400 × 360 mm (W × D) | |
| Shelves | 6 | |
PROCESS CONTROL | Interface | PLC with 10'' Touch Screen HMI |
| Gas Channels | x2 MFC, compatible with O₂, Ar, N₂, H₂, etc. | |
| Pressure Gauge | Pirani Sensor | |
SERVICES | Electrical | 380 VAC, 50-60Hz |
| Power Cord | Suited to region | |
| Compliance | CE |
PRODUCT FEATURES
Fast Deposition Rate
Good Film Quality
Process Stability
High Productivity
Fully Automatic
Simple Operation
Plasma
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