As a precision dry cleaning equipment, the vacuum plasma cleaning machine is suitable for cleaning mixed integrated circuits, single-chip integrated circuit casings, and ceramic substrates; It can be applied to precision cleaning in industries such as semiconductors, thick film circuits, pre packaging of electronic components, etching of silicon wafers, vacuum electronics, connectors, and relays. It can remove organic substances such as grease, oil stains, and oxide layers on the surface of materials. It can also be applied to the activation of surfaces such as plastics, rubber, metals, and ceramics, as well as life science experiments.